VAPOR'BOT

Precursor evaporation is required for all gas phase processes, like CVD, ALD or EPI. SEMPA has been developing VAPOR’BOT to address this broad range of applications.

The evaporation technologies applied range from vaporizers over bubbler systems towards advanced direct liquid injection (DLI) units. Whether you require extremely high evaporation rates, ultra-stable concentrations or highest flexibility in flow rates, you will find your solutions within the VAPOR’BOT family of products.

VAPO‘BOT is available in three basic versions (SMART, PRO, EXPERT) meeting different process needs and budgets. The system can also be adjusted very precisely to your requirements through a variety of available optional features.

• Automated bubbler based evaporation system
• Safe evaporation of dangerous (toxic or pyrophoric) precursor chemicals
• Used in all CVD, ALD processes
• Cost optimized design

• Fully automated system design
• Safest setup for energetic and toxic precursor substances
• Uninterrupted supply by automated refill of vaporizer
• Production oriented system design

• Fully automated Direct Liquid Injection System
• Direct Vapor generation for highest throughput
• Used where bubbler bases systems reach it’s limits
• Central precursor vapor fab supply to multiple points of use