Precursor evaporation is required for all gas phase processes, like CVD, ALD or EPI. SEMPA has been developing VAPOR’BOT to address this broad range of applications.
The evaporation technologies applied range from vaporizers over bubbler systems towards advanced direct liquid injection (DLI) units. Whether you require extremely high evaporation rates, ultra-stable concentrations or highest flexibility in flow rates, you will find your solutions within the VAPOR’BOT family of products.
VAPO‘BOT is available in three basic versions (SMART, PRO, EXPERT) meeting different process needs and budgets. The system can also be adjusted very precisely to your requirements through a variety of available optional features.
Many options are available to adapt the system exactly to your application or the specific requirements of the precursor.
|Precursor specific Solutions
Contact us to get the optimal solution for your process.
© 2023 by SEMPA SYSTEMS | german certified manufacturer of high precision equipment