References

TMA/TMGa System for Dispensing Large Quantities

• For ALD, CVD, MOCVD, MOVPE, EPI, and other gas-phase processes
• From small quantities to large consumption volumes
• A wide range of chemicals, including critical chemicals (TMA, TMGa, TCS, TDMAS)
• Industries: Semiconductors, Photovoltaics, Chemicals, Pharmaceuticals, Batteries
• References in Europe and the U.S., with a strong focus on the semiconductor industry

CHEM’BOT BULK: Delivery System for High-Volume Manufacturing

• High availability through reliable system design
• Efficient use of precursor chemicals
• Safety for demanding processes
• Automated processes for safe operations
• Modular design and scalability
• The system works with the following materials: DEZn, TMAl, TMGa, TBAs, TPB, TEB, DADI, HMDSO, HCDS, TCS, TEOS, SO2, TEMAHf, TDMATi, TDMASn, M-DEOS, DEMS, OMCTS, BCHD, DIPAS, BDEAS, BTBAS, TiCl₄, hexane, pyridine, ZAC, CpZr, and many others, including low-volatility monomers and organic precursors

PE-ALD: Combined Bubbler and DLI System

• Distribution panel for 8 evaporator rods
• European OEM for ALD and CVD delivery systems

Valve Manifold Panel - VMB

• Custom project for 8 VMBs
• Fully automated; for a large Italian semiconductor fab

Solar Factory Germany

Pipeline construction ranging from the smallest to the largest diameters, for all processes and materials

Supply CONTAINER‘BOT – the external gas chamber solution

No room in the building for a gas room? The solution is our Supply CONTAINER‘BOT - a ready-to-connect container equipped with gas supply and distribution systems, its own purge gas supply, and all necessary safety systems. This makes it suitable for virtually all process gases.

The CONTAINER'BOT is equipped with a heating system and ventilation systems, making it just as easy to regulate the temperature as an in-house solution.

Fermentation

Project Size:              €800,000.00
Duration:                     approx. 6 months
Documentation:       100% weld documentation using endoscopy
GMP / FDA:                  Compliant design
Special feature:         Pre-assembly at the Dresden site with FAT
                                          Disassembly and assembly on site

Pharmacy

Technical equipment for media supply to a pharmaceutical production facility for injectable products used in neurology and oncology, as well as a laboratory building

Total project cost > €200 million; project duration: 2018 to 2022

Installation planning, 3-D design, project management, delivery, installation, commissioning, and qualification of the utility supply

• Supply of stainless steel storage tanks with a capacity of up to 25,000 liters
• Equipment with heat exchangers for WFI production with a capacity of up to 20 kW
• Cleanroom Installation of Sampling Points and Dispensing Points
• Hook-up Installation of the Delivered Pharmaceutical Equipment and Devices
• Installation of PW-Medium via a pipe bridge to the laboratory building
• Equipping the laboratory building with compressed air and ultra-pure steam
• Technical Implementation of Specialized Applications

H₂Demo – Hydrogen Directly from Sunlight

• Development and manufacture of a highly automated supply system as part of the H₂Demo research project
• Designed to supply a newly developed high-throughput epitaxial reactor
• Automated delivery of up to 23 different precursors
• Equipment dimensions exceeding 5 m in length, 1.3 m in width, and more than 2 m in height
• Integration of more than 60 mass flow controllers and pressure controllers, as well as over 100 pneumatic components

ATOPLOT – Precise Feeding for Atomic-Layer 3D Printing

• Development and manufacturing of the gas and precursor delivery system for the ATOPLOT Nanofabricator
• Support for a high-precision, localized ALD process for additive manufacturing at the micro- and nanoscale
• Integration of SEMPA delivery technology into the prototype developed and tested as part of the research project
• Contribution to the successful demonstration of Atomic Layer Additive Manufacturing (ALAM) using various materials and functional structures