CHEM’BOT’s are state of the art liquid chemical delivery systems. CHEM’BOT supplies precursor chemicals to bubblers or vaporizers, direct liquid injections or on-board buffer tank.
More than a decade of experience ensures ultra-high purity liquid supply - safely and with the SEMPA quality promise. All of our systems have a proven and deliberate control unit. A PLC facilitates easy monitoring and process steering. The user interface is intuitive and clear for safe handling. CHEM’BOT is suitable to supply to single and multiple points-of-use making it the perfect choice for lab or fab.
CHEM‘BOT is available in three basic versions (SMART, PRO, EXPERT) meeting different process needs and budgets. The System can furthermore be adapted very precisely to your requirements through a variety of available options.
CHEM'BOT is designed and built to the highest quality standards to meet the high demands of our customers. Primarily built for the requirements of the semiconductor industry, CHEM'BOT is also suitable for many other industries and applications.
Ultra high purity components
Easy to maintain
CHEM'BOT family covers all common containers. No matter whether a small container or several hundred liter BULK vessels. CHEM'BOT can be tailored to your chemistry, consumption and process.
Our system operates with many materials:
DEZn, TMAl, TMGa, TBAs, TPB, TEB, DADI, HMDSO, HCDS, TCS, TEOS, SO2, TEMAHf, TDMATi, TDMASn, M-DEOS, DEMS, OMCTS, BCHD, DIPAS, BDEAS, BTBAS, TiCl4, Hexane, Pyridine, ZAC, CpZr and many more including low volatile monomers and organic precursors
Energetic materials like pyrophorics such as Trimethylaluminum (and most other metal organics) used in numerous processes. However, pyrophoric substances do spontaneously ignite on air, hence carry an intrinsically huge risk for fire and potentially dangerous situation while they are used. There have been already too many even fatal incidents in the electronics industry using such precursor materials.
Together with our partner Basis Solutions LLC we have designed a fully integrated self-contained safety control system which monitors and controls the environment within the CHEM’BOT, while keeping a minimum footprint of the cabinet. In the event of a liquid leak, CHEM‘BOT EnMat will contain and abate any leaked pyrophoric metal organic without fire, damage, or particle contamination to the fab. Thus, CHEM’BOT EnMat provides maximum incident mitigation and secures continuous production.
Contact us to get the optimal solution for your precursor.
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