Research & Development

q  Management  |  Career  |  R&D

SEMPA constantly strives to improve or invent new products and services. Our unique SEMPA LAB offers you Joint Development Projects (JDP) which help you shorten time to market and reach faster and deeper understanding about the use of novel precursor chemistry. Internal R&D projects look at whats next finding solutions for the challenges of tomorrow.

Tomorrows technology requirements are a constant driver for SEMPA. In order to support our customers we have been creating an industry unique innovation laboratory. SEMPA LAB is setup to design, test, prototype and optimize next generation technology processes. Nowadays high tech industries have a constant need for novel materials. Typically such novel materials are created by means of vapor deposition techniques such as CVD, PECVD, ALD, Epitaxy and other film deposition technologies. For those materials novel precursor chemicals have to be applied where in many cases the properties of the chemicals are not yet fully know, or where the chemicals exhibit a rather dangerous nature or the precursors have to be handled under special conditions. SEMPA LAB offers the possibility working with such novel precursor in a safe environment. Our area of expertise and possibilities at SEMPA LAB span from:

• Vaporization studies and design of vaporizers for novel precursor materials for both
  • Liquid precursors
  • Solid precursors
• Design and test of bulk distribution solutions
• Material and parts compatibility tests
• Optimizing of purging and flushing prcocedures
• Handling of very sensitive precursor materials
  • Pyrophorics
  • Corrosives
  • Inorganic as well as organic substances
  • …plus many more

Examples

High flow rate Trimethylaluminum (TMAl) vaporizer

Due to the very reactive properties of TMAl there had been many reports in the industry of clogged lines by particles which caused in some cases very serious safety issues. At SEMPA LAB we have been doing intensive studies on best handling procedures for TMAl in direct liquid injection systems. Especially for deposition processes which require very high evaporation rates the requirements on such equipment are rather demanding. Based on detailed studies at SEMPA LAB we could develop a seamlessly working product. Our VAPOR’BOT family of vaporizers are specifically available for pyrophoric precursors like TMAl enabling safe use and preventing clogging and related downtime.

Enabling novel low vapor pressure materials

Many novel precursor materials whether they are inorganic or organic to exhibit a very low vapor pressure which makes evaporation a challenge. Beside this also purging of lines before source cylinder exchange are maintenance is also challenging. To prevent getting in contact with dangerous or toxic precursor materials a thorough cleaning of the piping and connection system is crucial, otherwise safe handling and seamless operation cannot be assured. At SEMPA LAB we have been doing extensive purging studies for different classes of such precursor molecules. For purging either inert gases or appropriate solvents have been applied. Our CHEM’BOT liquid delivery systems can specifically be adapted to such precursors chemistries ensuring customers highest uptime operation and safe handling for operator personal.

Current funded research activities