• Guaranteed*

    reliable total supply solutions

    * We totally live up to our promises!

    READ MORE r

    READ MORE  q  We do offer bulk and specialty gas cabinets, advanced precursor chemical supply solutions and innovative evaporation systems. Within our product family GAS’BOT, CHEM’BOT and VAPOR’BOT you will find a solution for your specific application – safe, reliable and optimized to your needs.

  • Focussed*

    on your precisely tailored solution

    * Your Process is our focal point!

    READ MORE r

    READ MORE  q  Every process has different requirements regardings materials, chemicals, flow rates, safety, etc… We look into the details and shape your supply solution to your specific process. Any novel material can be pretested in our unique SEMPA LAB, optimizing every detail for maximum performance and short time-to-market.

  • Persistant*

    to reach optimum cost of ownership

    * Our Promise - guaranteed performance!

    READ MORE r

    READ MORE  q  We are totally committed to quality. Our business is ultra-pure media supply and our benchmark zero deficiencies. We have stringent quality procedures in place from design of the system, till start-up at our site. All our products and supply solutions have guaranteed performance – no ifs, ands, or buts.

We are SEMPA SYSTEMS – THE product innovator in the design and construction of ultrapure Gas- and Chemical delivery solutions.

  • Guaranteed*

    reliable total supply solutions

    * We totally live up to our promises!

  • Focussed*

    on your precisely tailored solution

    * Your Process is our focal point!

  • Persistant*

    to reach optimum cost of ownership

    * Our Promise - guaranteed performance!

We are SEMPA SYSTEMS – THE product innovator in the design and construction of ultrapure Gas- and Chemical delivery solutions.

SEMICONDUCTOR PARTNERSHIP

ULTRA PURE FACILITY INSTALLATIONS


SEMPA SYSTEMS design and manufacture stainless steel Gas and Chemical supply systems.
We offer solutions for high purity gases and precursor chemicals. Our products ensure the integrity of the material from the supply vessel into the process chamber – enabling utmost Uptime and maintaining highest Quality.

MORE DETAILS r

Beside bulk gases and standard precursor chemistry SEMPA SYSTEMS is leading in supply systems for energetic materials.
If your production uses or is planning to start processes with such precursors SEMPA is your partner of choice.
We offer unsurpassed safety in combination with highest uptime for all our system solutions.


SEMPA has been engineering highly functional supply system solutions. We manufacture the systems, deliver and
install on site and train customers on safe use and handling. Whether your needs are for any kind of standard,
energetic or toxic materials – SEMPA offers the right solution.

CLOSE u

WHAT WE DO

 

 
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Manufacturing

On more than 2.000 sqm shop floor we have ideal manufacturing conditions including several production lines,  clean room, workshops for metal working and electrical as well as a test and R&D lab.

 
SEMPA Manufacturing

 

 
SEMPA Facility Installations
 
 
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Facility Installation

SEMPA’s team of professionals is your experienced partner for any kind of high purity gas and precursor facility installations

 

 

 
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Products

Decades of experience are the basis of our product offering. We have the perfectly tailored solution for gas and precursors cabinets as well as add on safety systems and unique measurement technology

Advanced Supply Systems      Measurement Technology      Safety Equipment

 

SEMPA SYSTEMS Vapor BOT

 

SUPPLY’BOTs

unique delivery cabinets

We do offer bulk and specialty gas cabinets, advanced precursor chemical supply solutions and
innovative evaporation systems. Within our product family GAS’BOT, CHEM’BOT and VAPOR’BOT
you will find a solution for your specific application – safe, reliable and optimized to your needs.

 
 
Sempa Systems: GAs'BOT
 

PRODUCTLINE
GAS’BOT

Our GAS’BOT family of systems supplies bulk
and specialty gases
to point of use.
 
 
 

Sempa Systems: CHEM'BOT

 

PRODUCTLINE
CHEM’BOT

CHEM’BOT is the choice for any liquid feed.
It’s unique design is unsurpassed in safety
and reliability.
 
 
 

 

PRODUCTLINE
VAPOR’BOT

Our VAPOR’BOTs enable safe and efficient
evaporation
of any kind of precursor molecules.
 
 

SAFETY
EQUIPEMENT

unique solutions
for safe operation

 

SEMPA SYSTEMS: ECS1

SAFETY EQUIPEMENT
ECS1 – Emergency Cylinder Shutter

ECS1 is an automatic mechanical shut-off system.
 
 

MEASUREMENT
TECHNOLOGY

innovative metrology
for improved process control

 

SEMPA SYSTEMS: HiBarSens

MEASUREMENT TECHNOLOGY
HiBarSens®

HiBarSens® measures water vapor transfer rates through barrier materials.
 


our products

  • We find the right solutions

    to your challenges

    The right pick of components and parts is crucial for a seamless operation of our system. Through detailed engineering we exactly understand the requirements of your supply system. This enables us designing the system with perfectly fitting part and components.
  • Highest precision & quality

    is our business

    Nowadays processes to manufacture high end semiconducting devices have stringent requirements on gas and chemical supply. We apply advanced welding processes and have detailed assembly procedures which ensure highest quality products and installations.

  • We educate

    our next generation experts

    Expert craftsmanship is the basis for highest quality installations. We constantly seek for talents and educate the next generation of professionals. We do support the ambitions of any member of our team for additional qualifications and trainings.
  • Our team

    is at your service

    Your success is our mission. Our team of professionals is always on your side addressing your needs. We work closely together through all phases of a joint project having us totally focused on your requirements.
  • Highest purity day to day

    is the basis of our work

    We handle ultra pure gases and chemicals and we ensure that the purity and integrity of the product is preserved from supply bottle or vessel till it reaches the process chamber. All our components are manufactured in our clean room followed by stringent inspection and testing.

  • Your partner

    for facility installations

    We plan, build and maintain tubing installations from lab to fab size.
    - Focus on Stainless Steel 316L from 1/8“ up to 8“
    - Hastelloy, Copper, Brass, Monel
    Proven combination of all used mechanic, pneumatic and electric components leads to unequaled longevity, highest quality and safe operation.

  • We find the right solutions

    to your challenges

  • Highest precision & quality

    is our business

  • We educate

    our next generation experts

  • Our team

    is at your service

  • Highest purity day to day

    is the basis of our work

  • Your partner

    for facility installations

Meet us

at the upcoming events

SEMPA is constantly attending conferences and tradeshows to get in touch with our customers.

next events

ALD for Industry 2020
December 2nd – 3rd
Freiburg, Germany

ICMOVPE XX
Juli 04th – 09th
Stuttgart, Germany

SEMICON EU 2020
November 10th – 13st
Munich, Germany

all events r

SEMPA SYSTEMS GmbH    |    Grenzstraße 13    |    01109 Dresden    |    Germany
+49 (0) 351 888 10 0   |    info (hello@spam.com) sempa.de

© 2019 by SEMPA SYSTEMS    |   german certified manufacturer of high precision equipment